The Pegasus PG3000 is specifically designed for production probing applications involving semiconductors, LEDs and MEMS devices. Especially, PG3000 ideally meets the LED industry requirement by way of its area-scanning technology to probe LED die mounted onto blue tape/ ring carries.
XY Stage
Z Stage
Revolution Theta
Chuck Plate
Type: High precision
recirculation ball lead screws
Stage Travel:
300mm x 300mm
Resolution: 0.5 μm
Accuracy: ≤ ±7 μm
Repeatability: ±4 μm
Type: Stepper motor drive -
linear bearings
Stage Travel:
11.5mm (0.45”) max
Resolution: 1 μm
Accuracy: ≤ ±2 μm
Repeatability: ±4 μm (0.0001”)
Loading: 10kg max
Angle: ± 10°
Resolution: 0.001°
Material:
High strength alumina alloy
(gold or nickel coating)
Flatness: ≤ 15 μm
