PEGASUS PG2000D is develpoed for testing components such as DIODE, MOSFET and IGBT wafers. PEGASUS PG2000D is a probe station with a double-sided, four-wire probe structure.
The structure eliminates impedance problem on the probe platform and minimizes the effect on test results. It makes the component under test to be closer to the engineering design requirements.
Features
Robust housing and compact size
Supports Windows system, English software interface, real-time mapping graph display
Easy-to-use control console and joystick
High-precision drive motor provides stable and quiet operating environment
Easy-to-maintain modular electronic control mechanism
Double-sided probe structure to improve test circuit impedance.
Test current up to 30A
Applicable to 3" ~ 8" wafers
Customized designs available
Standard TTL and RS232 communication interface for variety of testers
Excellent probing speed and probe marks
XY axis
Architecture: High-precision circulating ball screw
Travel: 210mm × 210mm
Resolution: 0.5 μm
Accuracy: ≦±7 μm (203mm)
Repeatability: ±4 μm (203mm)
Probe arm
Travel: 10mm
Resolution: 1 μm
Accuracy: ≦±2 μm
Repeatability: ±4 μm
Chuck plate
Material: High insulation artificial stone plate
Wafer size: 3'' / 4'' / 5'' / 6'' / 8''
Adjustable angle: ±10°
Resolution: 0.001°
Microscope
Eyepiece: 20X
Objective: 1X~4.5X
Magnification: 20X~90X
Dimension
90 (D) x 70 (W) x 173 (H) cm (Excludes microscope, signal tower and monitor)
Test time
Weight
250 KG
Options
Various types of microscopes
CCD Camera
English software interface Real-time mapping graph
