Features
Compact size, light weight, cost effective
Different type of probe and chuck available for several applications
Suitable for below 4” wafer
R&D centre and university lab suitable
Application
LED wafer & chip charaterise
LD/PD and other optical electronical device charaterise
Discrete device / MEMS semiconductor device charaterise
Other composite functional material / ceramic material / semiconductor material charaterise
Specification
4” Ni coating metal chuck
2”/3”/4” switchable vaccum lines
X-Y travel range: 4” x 4”(10μm resolution)
Z lift travel range: 10mm
Chuck Theta adjustable(option)
Support 4 micropositioners as Max.
Size: 370mmWx370mmDx450mmH with Microscope
Weight: 20kgs with Microscope
Microscope specification:
Eyepiece range: 20
Objective magnification: 0.67 ~ 4.5
Min. view area: 2.7mm diameter
LED lighting
Requirement: Power: AC 100~240V(50/60Hz)
Vacuum: -250 mmHg, 7 liter/min
Standard accessories
Magnetic type Micropositioner 2 pc
BeCu probe 10 pc
Optional accessories
Gold coating metal chuck
High voltage probe/chuck
Low current/capacitance probe
Measurement adapter
Probe card holder/probe card
Hot chuck (Ambient ~200。C)
Anti-vibration table
Shielding box
Vaccum pump
