PG2101 Semi-automatic prober is designed for LED Flip Chip production line. It can do top side or bottom side probing test. This prober is suitable for 2”~6” wafers and dices. PG2101 also
can tune the probing speed to fit the different applications. It also can depend on customer’s requirement to make different customer design.
Features
Fit for any kind of LED die testing, including single pole red/yellow dies, two poles blue/green dies, back-light dies
Easy operation cover can shield the light to reduce the effect for test
One button to do alignment, scan and test max 6” scanning areas for diced wafer with max 80mil x 80mil die
Friendly operation only by a joystick and simple push-buttons on the key board panel
Environment-light-proof by an easy-lift cover
PC-base Window Operation System easy for showing mapping chart and probingparameters on the monitor
Fast area-scanning technology for accurate die location on the diced wafers
High stable manipulator with a sensitive Edge Sensor provides tiny probe marks
Support 4 Edge sensor manipulators. Removable probe holder easy to change needles
Support 2 Inkers to provide real-time inking
Quiet and low vibration motion control system provides a non-noise operation environment
Standard TTL and RS232 interface for variety of tester
X/Y Stage
Type: High precision recirculation ball lead screws
Travel:210mm x 265mm
Resolution:0.5 μm
Accuracy:≦±7 μm
Repeatability:±4 μm
Z Stage
Type:Stepper Motor Drive – Linear Bearing
Travel:-0.5 ~ 7.5 mm
Resolution:1 μm
Accuracy:±≦2μm
Repeatability:±≦4 μm
Theta Axis
Range:±10°
Resolution:0.001°
Chuck Plate
Size: 4” ~ 6”
Material:Quartz
Vacuum hole:Φ500um
Flatness:10μm
Manipulator
3 axis adjustable
Resolution:10mil/turn
Edge sensor:Magnetic type
Probe Lift > 800,000 contacts
Microscope
Eyepieces:20x
Objective :1x~4.5x adjustable
Zoom ratio: 20x~90x
Dimension
84 (D) x 100 (W) x 157 (H) cm (not incluse monitor and signal tower height)
CCD Scan Camera
Telecentric Lens 0.8X / 1024X768 pixels
Scan range:8 x 8 mil~80 x 80 mil
Scanning Time:15K / 1 minute(2 inch)
Weight
400 KG
Vacuum
0.5 cfm at 20" Hg (min) , Φ4mm tube
Power consumption
100~240VAC,47~63Hz,<10A
Options
Edge Sensor Maipulator up to 4
Inker up to 2
Integrated sphere fixture
Microscope for different magnification
Through Put
Operation screen with bilingual language Equipped with integrated sphere fixture
and real time mapping